Field Emission Scanning Electron Microscope

1. Manufacturer and model: JEOL-JSM-7800F

2. Test Content: Microscopic morphology, structure of the solid sample, elemental composition and line distribution, surface distribution, etc. (Equipped with Energy Dispersive X-ray Spectrometer)

3. Vacuum degree: Electron gun chamber high vacuum 10^-7 Pa; Provide UPS for ion pump; Delay more than 200 hours; Sample chamber vacuum 10^-4 Pa

4. The pump system: Magnetic suspension turbomolecular pump, two ion pumps and one mechanical pump

5. Electron gun: High stability immersion Schottky thermal field emission electron source, can automatically adjust the axis

6. Technical indicators: Resolution: 0.8 nm (15 kV) 1.2 nm (1 kV); Magnification: 25~1,000,000x; Accelerating Voltage: 0.01~30 kV; Probe current: 200 nA (15 kV); Objective lens design: High resolution observation using the Super Hybrid Lens; Specimen stage: 5-axis motor drive stage

Test leader: Xuehua Liu

Email: liuxuehua@qdu.edu.cn