Test content

XPS，AES，UPS，Etch, Depth Profiling

Light source

Al Kα，Mg/Zr

Main Specifications

1. The vacuum degree can reach 10-8 Pa;

2. The energy resolution is better than   0.48 eV for the peak width at half maximum (FWHM) of Ag3d5/2

3. Imaging resolution up to 10 μm

4. The diameter of the X-ray focused beam   spot is 10 μm to 400 μm; the analysis area can reach: Ø 10 μm ~ 1400 μm   × 1400 μm

5. Equipped with double beam   neutralization system

Main functions of the instrument

Elemental composition, valence and   chemical environment analysis of various solid materials and membrane   materials

Main accessories

Mg/Zr double anode, scanning Auger   accessory (AES), hot and cold sample stage, in situ gas reaction device,   ultraviolet electron source (UPS), etc

Test contact

Xuehua Liu liuxuehua@qdu.edu.cn